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Conference Track: Emerging
Technologies
Selection1:
Paper
Language:
English
Keywords:
Dislocation, Semiconductor crystal, finite element method
Contact Title: Prof.
Contact First Name: C.T.
Contact Last Name: Tsai
University:
Florida Atlantic University
Web:
http://www.me.fau.edu/faculty/tsai/index.html
Position:
Country:
USA
Email:
tsaict@fau.edu
Paper Title:
Dislocation reduction in semiconductor crystal growth
Abstract:
The presence of dislocations not only considerably reduces the
lifetime and
performance, increases the degradation rate of devices made from
electronic and
optoelectronic materials, but also has a major impact on electronic
and optical properties
of these materials. Therefore, the commercial viability of
high-speed electronic and
photonic devices and circuits is strongly dependent on the
availability of low dislocation
density III-V and II-VI semiconductor compounds.
Even though much effort has been
devoted to study the dislocation reduction in these compounds grown
from the melt, the
details of the dislocation generation remain one of the least
understood mechanisms
related to the growth of high quality single crystal materials from
the melt or from the
vapor.
In order to reduce dislocation density generated in the
semiconductor crystal, the
mechanisms of dislocation generation has to be understood. A finite
element model,
which couples the microscopic dislocation density to the
macroscopic plastic
deformation, will be employed to predict the dislocation density
generated in the crystal
under different crystal growth parameters. The predicted results
will be used to
investigate the correlation between dislocation generation and
crystal growth parameters.
It is hoped that the reveal of this correlation will help to
improve the current crystal
growth process, and to guide future design of an intelligent
crystal growth system. This
intelligent processing system will enable crystal growers to reduce
dislocation density in
a semiconductor crystal through the control of growth parameters.
Mailing Address:
Department of Mechanical Engineering
Florida Atlantic University
777 Glades Road
Boca Raton, FL 33431
Phone:
Authors:
X.A. Zhu / xzhu2@fau.edu / Florida
Atlantic University /(P)
C.T. Tsai / tsaict@fau.edu / Florida
Atlantic University
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